Murata - World’s first surface-mount MEMS angular acceleration sensor

Murata Manufacturing Co., Ltd. announced that it has successfully developed the world's first surface-mount MEMS angular acceleration sensor. In recent years, the demand for angular acceleration sensors with compact size, high sensitivity, low noise and wide band characteristics has been increasing. Recognizing this need, Murata combined its technology for designing inertial sensors (such as acceleration sensors and gyro sensors) with MEMS (microelectromechanical sensor) processing technology to successfully develop the world's first surface-mount type MEMS angular acceleration sensor. The size of the accelerometer is only 5.2mm x 2.5mm (typical). x 0.8mm or less It contains a detection band greater than 1kHz and an effective value of angular acceleration equivalent noise less than 1rad / s²ms. The department has registered patents in Japan and overseas, and has more than 10 patents pending. Typical applications include detection of angular acceleration and detection of rotational vibration.